I roto i ngā whare marino o ngā taiwhanga whakatikatika, ngā rūma horoi haurua-ira, me ngā whare ine ine rererangi, kei te haere tonu tētahi hurihanga marino. Ehara i te mea nā te pūmanawa, nā ngā pūoko rānei anake i akiaki—engari nā ngā rauemi tonu e hanga ana i te tūāpapa o te ine tonu. Kei mua i tēnei nekehanga ko ngā taputapu ine uku matatau, tae atu ki te rūri hau tika uku tino pumau me te silicon-carbide tino pakari (Si-SiC) he parallelepiped me te tapawhā. Ehara ēnei i te mea he taputapu noa iho; he mea whakahohe i tētahi wā hou e kore e taea te whiriwhiri i te pumau, te auau, me te kore wera.
Neke atu i te haurua rautau, ko te karāhe pango te rangatira o te ine tika. Nā tōna whakamākū tūturu, te iti o te horapa wera, me te papatahi pai rawa atu i meinga ai hei rauemi matua mō ngā pereti mata, ngā tapawhā, me ngā taha tika. Heoi, i te mea e pana ana ngā ahumahi ki ngā ātete iti-micron me te nanometer-tauine - inā koa i roto i te lithography semiconductor, te whatu ātea, me te rorohiko irahiko - kua tino kitea ngā herenga o te karāhe. He taumaha, he ngawari ki te pakaru i raro i te pa atu, ā, ahakoa tōna rongonui, he iti tonu te ngoki roa i raro i te kawenga, i te rerekētanga taiao rānei.
Whakauruhia ngā uku hangarau: ehara i te mea he uku pakarukaru o te whakaaro o ia rā, engari he rauemi matotoru, ōrite, mahi teitei i hangaia i raro i te wera nui me te pēhanga. I roto i ēnei, e rua ngā momo e tū ana mō ngā tono ine: te alumina parakore-teitei (Al₂O₃) me te silicon carbide hononga-tauhohenga (Si-SiC). Ahakoa e whakarato ana ēnei e rua i ngā whakapainga nui ki ngā rauemi tuku iho, he rerekē ā rāua mahi—ā, i te wā kotahi, e tohu ana rāua i te pito hou o ngā mea ka taea i roto i te ine ine ā-ahu.
Hei tauira, tangohia te rūri tika hau uku. I hangaia hei whakamahi me ngā wāhanga kawe hau, ngā ine whakawhiti whatu rānei, e hiahia ana tēnei taputapu kia tata ki te tika, kia iti te taumaha, ā, kia kore he nekehanga wera. He mea hanga ki te konumohe.ngā rūri uku—kua mīhinihia kia papatahi, kia tika hoki i roto i te ±0.5 µm i runga ake i te 500 mm, ā, kua orohia kia pakari te mata i raro i te Ra 0.02 µm—koia tonu te hua. Nā te iti o te mātotoru (~3.6 g/cm³) ka whakaiti i te koretake o ngā pūnaha ine hihiri, ā, nā te kore-aukume, kore-arataki ka whakakore i te pokanoa i roto i ngā taiao hiko tairongo, aukume rānei. I roto i ngā taputapu tirotiro wafer, i ngā tautuhinga whakatikatika aroturuki laser rānei, ahakoa he maikorone o te kopere ka taea te whakapiko i ngā hua, ka whakaratohia e te rūri tika hau uku he tohutoro pumau, koretake e mau tonu ana puta noa i ngā huringa pāmahana me ngā huringa mahi.
Engari ina hiahiatia te pakari me te kawe wera tino pai—pērā i te whakaritenga whakaata karu ātea, i te ine i te ana o te rēseri mana teitei rānei—ka tahuri ngā kaihanga ki ngā wāhanga whakarara me te tapawhā silicon-carbide (Si-SiC) tino tika. Ko te Si-SiC tētahi o ngā rauemi tino pakari e mōhiotia ana, me te modulus Young e neke atu ana i te 400 GPa—neke atu i te toru ngā wā i te maitai—ā, he kawe wera rite ki te konumohe. He mea nui, ka taea te hanga i tōna tauwehenga whānui wera (CTE) kia rite ki ngā karāhe whatu, ki ngā anga silicon rānei, ka taea ai te whakawhānui rerekētanga tata-kore i roto i ngā huihuinga ranu. Ko te tapawhā Si-SiC e whakamahia ana hei tohutoro matua i roto i te taputapu tuhi EUV e kore e mau noa i tōna āhua—ka ātete kaha ki te whakapohehe mai i te wera, te wiri rānei o te rohe.
Ehara i te mea ko ngā rauemi anake te mea e taea ai ēnei whakatutukitanga, engari ko te pūkenga hoki ki te hanga taputapu ine uku. Hei tauira, ko te miihini tika o te Si-SiC me whai wira huri taimana, papa CNC iti-micron, me ngā tukanga whakapiri maha-wāhanga e whakahaerehia ana i roto i ngā taiao e whakahaerehia ana te pāmahana. Ahakoa te ahotea toenga iti mai i te sintering hē ka arahi pea ki te warpage muri-mīhini. Koia te take he torutoru noa iho ngā kaihanga o te ao e whakauru ana i te hanganga rauemi, te hanga tika, me te ine whakamutunga i raro i te tuanui kotahi—he āheinga e wehewehe ana i ngā kaihanga kounga ine pono mai i ngā kaiwhakarato uku whānui.
I ZHONGHUI INTELLIGENT MANUFACTURING (JINAN) GROUP CO., LTD (ZHHIMG), ko tēnei whakaurunga poutū te mea nui o tā mātou kaupapa. Ko ā mātou taputapu ine uku—tae atu ki ngā tauira rūri hau tika uku kua whakamanahia ki te DIN 874 Grade AA me ngā taonga whakarara me ngā tapawhā silicon-carbide (Si-Si-C) tino tika e taea ai te whai i ngā paerewa PTB me NIST—ka hangaia i roto i ngā rūma ma ISO Class 7 mā te whakamahi i ngā kawa sintering me te whakaoti motuhake. Ka whakamanahia ia wāhanga katoa ki te interferometric, te manatoko CMM o ngā manawanui āhuahanga (papatahi, whakarara, poutū), me te whakamātautau i te pono o te mata i mua i te tukunga. Ko te hua he taonga tohutoro-tohu e kore e tutuki noa i ngā whakaritenga—ka nui ake i a rātou i roto i ngā puranga.
Kei te piki haere te hiahia mō taua mahi. I roto i te hanga haurua-ira, me whai hanganga whakahāngai pumau ngā pūnaha EUV me te NA-teitei ki roto i ngā tekau nanometer i runga i ngā tawhiti mita-tauine—kāore e taea me te kore he mahi tahi wera-mīhini a Si-SiC. I roto i te rererangi, ko ngā paepae whatu amiorangi i hangaia me ngā tohutoro uku ka whakarite i te pumau i runga i te porowhita ahakoa te huringa wera nui. Ahakoa i roto i ngā mara hou pēnei i te kitenga ngaru ā-papa, te whanaketanga karaka atomika rānei, he mea nui te pumau taumata-pikomita, kei te noho hei mea nui ngā taonga ine uku me te Si-SiC.
He mea nui, ka aro atu hoki ēnei taputapu ki te pumau me te utu katoa o te mana whakahaere. Ahakoa ka nui ake te haumitanga tuatahi ki tētahi parallelepiped silicon-carbide tino tika i tērā o tētahi rite ki te karāhe, ka roa ake tōna ora ratonga i roto i ngā taiao e whakamahia nuitia ana. Kāore e hiahiatia he hinu, he ātete ki ngā whakarewa me ngā plasma katoa, ā, kāore e hiahiatia he whakatikatika anō nā te mimiti makuku—he rerekē ki te rino maka, ki ētahi karāhe rānei. Mō ngā kaiwhakahaere kounga e mahi ana i raro i ngā paerewa AS9100, ISO 13485, SEMI rānei, ka puta tika tēnei pono ki te whakaiti i te wā kore mahi, te iti ake o ngā kitenga arotake, me te nui ake o te whakapono o ngā kiritaki.
Heoi anō, kaua e warewarehia te ataahua me te mahi a ēnei taputapu. He kanapa te tapawhā Si-SiC kua orohia, he rite ki te kanapa whakarewa, engari he iti ake te taumaha i te maitai. He pakari te āhua o te rūri hau tika uku, engari he ngāwari te hiki—he pai mō te manatoko ā-ringa i ngā wāhi kuiti. He mea nui ēnei āhuatanga e aro ana ki te tangata i roto i ngā taiwhanga o te ao tūturu, ina whai pānga te ergonomics me te ngāwari o te whakamahi ki te rere o te mahi o ia rā.
Nō reira, kei te tautuhi anō ngā taputapu ine uku i te tino tika? Kei roto i ngā raraunga te whakautu—me te rārangi tipu haere o ngā kaiārahi o te ao e tohu ana i a rātou hei paerewa. Mai i ngā whare ine ine ā-motu e whakamana ana i ngā paerewa roa o te whakatupuranga e whai ake nei ki ngā kaiwhakarato Tier 1 e whakamana ana i ngā wāhanga taraiwa EV, e mārama ana te panoni: i te wā me whakaiti te koretake, ka whakawhirinaki ngā miihini ki ngā miihini ine.
I a ngā ahumahi e haere tonu ana ki te whakahaere i te tauine atomika, kotahi te pono e kore e taea te whakakorekore: ko te heke mai o te ine e kore e whakairohia mai i te kōhatu, e whakarewahia rānei ki te konganuku. Ka whakakoihia, ka hurihia, ka orohia ki te uku—me te karawiti silicon.
Ko ZHONGHUI INTELLIGENT MANUFACTURING (JINAN) GROUP CO., LTD (ZHHIMG) he kaihanga auaha rongonui o te ao mō ngā otinga ine uku me te silicon-carbide tino tika. He tohunga ki ngā taputapu ine uku, te ruri hau tika uku, me ngā wāhanga silicon-carbide (Si-SiC) tino tika me ngā wāhanga tapawhā, ka tukuna e ZHHIMG ngā taonga kua whakamanahia katoatia, he mea hanga mai i te taiwhanga mō ngā tono haurua-ira, rererangi, parepare, me te rangahau pūtaiao. E tautokona ana e ngā tiwhikete ISO 9001, ISO 14001, me te CE, e whakawhirinakihia ana ā mātou hua e ngā umanga hangarau matua o te ao. Tirohia ā mātou putea ine matatau iwww.zhhimg.com.
Wā tuku: Hakihea-05-2025