I roto i te tukanga hanga haurua-haurua tino tika, matatini hoki o te takai wafer, he rite te ahotea wera ki te "kaipahua" e huna ana i te pōuri, e whakawehi tonu ana i te kounga o te takai me te mahi a ngā maramara. Mai i te rerekētanga o ngā tauwehenga whānui wera i waenga i ngā maramara me ngā rauemi takai ki ngā huringa pāmahana nui i te wā o te tukanga takai, he rerekē ngā ara whakaputa o te ahotea wera, engari e tohu katoa ana ki te hua o te whakaiti i te tere hua me te pā ki te pono o ngā maramara mō te wā roa. Ko te turanga karāhe, me ōna āhuatanga rauemi ahurei, kei te noho puku hei "āwhina" kaha ki te whakatau i te raruraru o te ahotea wera.
Te raruraru ahotea wera i roto i te takai wafer
Ko te takai angaanga he mahi tahi a ngā rauemi maha. Ko ngā maramara he mea hanga i ngā rauemi haurua-ira pērā i te silicon, engari he rerekē te kounga o ngā rauemi takai pērā i ngā rauemi takai kirihou me ngā papa. Ina rerekē te pāmahana i te wā o te tukanga takai, he rerekē te nui o te whakawhānui me te whakahekenga wera o ngā rauemi rerekē nā te mea he rerekētanga nui o te tauwehenga whakawhānui wera (CTE). Hei tauira, ko te tauwehenga whakawhānui wera o ngā maramara silicon he tata ki te 2.6 × 10⁻⁶/℃, ko te tauwehenga whakawhānui wera o ngā rauemi hanga kapia epoxy noa he teitei ki te 15-20 × 10⁻⁶/℃. Nā tēnei āputa nui ka kore e tukutahi te nui o te whakahekenga o te maramara me te rauemi takai i te wā whakamatao i muri i te takai, ka puta he ahotea wera nui i te hononga i waenganui i ngā mea e rua. I raro i te pānga tonu o te ahotea wera, ka piko pea te angaanga me te huri. I ngā wā kino, ka puta pea he hapa whakamate pērā i te pakaru o te maramara, te whati o te hononga honohono, me te wehewehenga o te hononga, ka hua ake he kino ki te mahi hiko o te maramara me te whakahekenga nui o tōna roa mahi. E ai ki ngā tatauranga ahumahi, ko te tere o te hapa o ngā takai wafer i puta mai i ngā raruraru ahotea wera ka eke ki te 10% ki te 15%, ka noho hei take matua e aukati ana i te whanaketanga whai hua me te kounga teitei o te ahumahi haurua-waea.
Ngā painga motuhake o ngā turanga granite
He iti te tauwehenga o te whakawhanuitanga wera: Ko te nuinga o te karāneti he tioata kohuke pēnei i te kuata me te feldspar, ā, he tino iti te tauwehenga o te whakawhanuitanga wera, mai i te 0.6 ki te 5×10⁻⁶/℃, he tata atu ki te maramara silicon. Mā tēnei āhuatanga ka taea te whakaiti i te rerekētanga o te whakawhanuitanga wera i waenga i te turanga karāneti me te maramara me ngā rauemi tākai i te wā e whakahaerehia ana. Hei tauira, ina huri te pāmahana mā te 10℃, ka taea te whakaiti i te rerekētanga rahi o te papa tākai i hangaia i runga i te turanga karāneti mā te neke atu i te 80% ki te whakataurite ki te turanga whakarewa tuku iho, e tino whakaiti ana i te ahotea wera i puta mai i te whakawhanuitanga me te whakahekenga wera kore-tukutahi, ā, e whakarato ana i te taiao tautoko pumau ake mō te karāneti.
He tino pai te pumau o te wera: He tino pai te pumau o te wera o te karāneti. He matotoru tōna hanganga o roto, ā, he piripono ngā tioata mā roto i ngā hononga ion me te hononga irahiko, e āhei ai te puhoi o te kawe wera ki roto. Ina pāngia ngā taputapu takai e ngā huringa pāmahana uaua, ka taea e te turanga karāneti te pehi i te awe o ngā huringa pāmahana ki a ia anō me te pupuri i tētahi mara pāmahana pumau. E whakaatu ana ngā whakamātautau e pā ana i raro i te tere huringa pāmahana noa o ngā taputapu takai (pēnei i te ±5℃ ia meneti), ka taea te whakahaere i te rerekētanga ōrite o te pāmahana mata o te turanga karāneti i roto i te ±0.1℃, ka karo i te āhuatanga o te kukū ahotea wera i puta mai i ngā rerekētanga pāmahana ā-rohe, ka whakarite kia noho te anga i roto i tētahi taiao wera ōrite me te pumau puta noa i te tukanga takai, me te whakaiti i te pūtake o te whakaputa ahotea wera.
Te pakari nui me te whakaiti i te wiri: I te wā e whakahaerehia ana ngā taputapu tākai wafer, ka puta he wiri i ngā wāhanga nekeneke o roto (pērā i ngā motuka, ngā taputapu tuku, me ētahi atu). Mēnā ka tukuna ēnei wiri ki te wafer, ka kaha ake te kino i puta mai i te ahotea wera ki te wafer. He pakari teitei ngā turanga karāneti, ā, he pakeke ake i te nuinga o ngā rauemi whakarewa, ka taea te ātete i te pokanoa o ngā wiri o waho. I taua wā, ko tōna hanganga motuhake o roto e whakarato ana i te mahi whakaiti wiri pai rawa atu, ā, ka taea ai e ia te tere te whakakore i te kaha wiri. E whakaatu ana ngā raraunga rangahau ka taea e te turanga karāneti te whakaiti i te wiri auau teitei (100-1000Hz) i puta mai i te whakahaeretanga o ngā taputapu tākai mā te 60% ki te 80%, ka whakaiti nui i te pānga hononga o te wiri me te ahotea wera, ā, ka whakarite anō i te tino tika me te pono o te tākai wafer.
Te pānga o te whakamahinga mahi
I roto i te raina whakaputa tākai wafer o tētahi umanga hanga semiconductor rongonui, whai muri i te whakaurunga o ngā taputapu tākai me ngā turanga karāhe, kua tutuki ngā whakatutukitanga whakamiharo. I runga i te tātari i ngā raraunga tirotiro o te 10,000 wafer i muri i te tākai, i mua i te tango i te turanga karāhe, ko te tere hapa o te piko o te wafer i puta mai i te ahotea wera he 12%. Heoi, i muri i te huri ki te turanga karāhe, ka heke tere te tere hapa ki roto i te 3%, ā, ka tino pai ake te tere hua. I tua atu, kua whakaatuhia e ngā whakamātautau pono mō te wā roa, whai muri i te 1,000 huringa o te pāmahana teitei (125℃) me te pāmahana iti (-55℃), kua heke te maha o ngā pakaru hononga honohono o te maramara i runga i te mōkihi turanga karāhe mā te 70% ki te whakataurite ki te mōkihi turanga tuku iho, ā, kua tino pai ake te pumau o te mahi a te maramara.
I te haere tonu o te hangarau haurua-ira ki te whakapai ake i te tika me te rahi iti, kei te kaha haere ngā whakaritenga mō te whakahaere i te ahotea wera i roto i ngā takai wafer. Ko ngā turanga karāneti, me ōna painga whānui i roto i te tauwehenga whānui wera iti, te pumau wera me te whakaiti i te wiri, kua waiho hei whiringa matua mō te whakapai ake i te kounga o ngā takai wafer me te whakaiti i te pānga o te ahotea wera. Kei te piki haere te hiranga o tā rātou mahi ki te whakarite i te whanaketanga pumau o te umanga haurua-ira.
Wā tuku: Mei-15-2025