I te ao o te hanga tino tika—te wāhi e heke ai ngā āheinga ki raro iho i te 5 maikorona, ā, e tata ana ngā whakaotinga mata ki te kounga whatu—me whanake haere ngā taputapu e whakawhirinakihia ana e tātou ki tua atu i ngā tikanga tuku iho. Mō ngā tekau tau, ko te maitai me te karāhe te mea nui rawa atu i roto i te ine. Engari i te mea e pana ana ngā ahumahi pēnei i ngā taputapu haurua-ira, ngā whatu rererangi, me ngā taputapu moroiti hauora ki ngā ao e puta ai te hapa kāore e whakaaetia ahakoa te paheketanga wera, te kakahu moroiti rānei, kei te puta ake he momo taputapu tohutoro hou: ko ērā i hangaia ehara i te mea mai i te whakarewa, i te kōhatu rānei, engari mai i ngā uku hangarau matatau.
I ZHHIMG, kua neke atu mātou i te tuku noa i ngāRūri Tika Ukungā hua Rūri Tapawhā Uku rānei. Kei te tautuhi anō mātou i te āhua o te taha tika—mā te whakakotahi i ngā rauemi uku tino pumau me te hoahoa matatau, tae atu ki tā mātou rūri uku rangi mānu ritenga hou, he otinga e whakakore katoa ana i te pā ā-mīhini me te whakarato i te kaha whakahoki taumata-nanomita.
He aha i hangaia ai he uku? Ka tīmata te whakautu i te taumata ngota. Kāore i rite ki te maitai—e whānui haere ana i te pāmahana—ki te karāneti rānei—ahakoa tōna pumau, he pūwero tonu, he rerekē tonu—ko ngā uku hangarau pērā i te zirconia-toughened alumina (ZTA) me te silicon nitride e tata ana ki te kore te pūwero, he pakeke rawa (1400–1800 HV), ā, he iti iho i te 3–4 µm/m·°C ngā tauwehenga whānui wera. Ko te tikanga o tēnei, ka mau tonu te āhua o te Ceramic Straight Edge mai i ZHHIMG ahakoa ngā huringa pāmahana ka whakapōturi i ngā taputapu tikanga mā te maha o ngā maikoroni.
Engari kāore e ranea ngā rauemi anake. Ko te mea e tino wehewehe ana i ā mātou rūri uku ko te tika o tā rātou hanga. Mā te whakamahi i te huri taimana, te whakakanapa i raro i te whakatuwheratanga, me te whakamanatanga whakawhiti laser i roto i ngā rūma ma ISO Class 5, ka tutuki i a mātou ngā ātete tika pai ake i te 0.8 µm i runga ake i te 500 mm—kua manatokohia ehara i te mea i te wā tuku noa, engari kua tuhia ki roto i ngā pūrongo whakatikatika katoa ka taea te whai i ngā paerewa NIST me PTB. IaRūri Tapawhā Ukuka whakamatautauria te poutū mā te whakakānga-ā-roto hiko, kia mau tonu ai ngā koki i roto i te 1 hekona-āwhata (≈0.5 µm te rerekētanga i te 100 mm).
Ehara ēnei i te mea he whakaritenga ariā. He mea tūturu ēnei mō ngā kiritaki kāore e taea te utu i te utu iti. Inaianei, kei te whakamahia e tētahi kaiwhakarato wāhanga EUV matua tā mātou Rūri Tika Uku mō te whakahāngai i ngā anga tautoko whakaata anake. "I piko ngā rūri maitai i ngā huringa roa o te whakaaturanga," te kōrero a tā rātou tohunga matua mō te metara. "I kohia e te karānite ngā matūriki. Ko te putanga uku? Kua 18 marama te pumau—kāore e hiahiatia he whakatikatika anō."
Ahakoa te āhua tino pai, ka taea te whakararu i te pānga. Mēnā ka tōia he rūri ki runga i tētahi mata, ka tūpono koe ki ngā rakuraku moroiti, ki te pokanoa ki te kiriata hinu, ki te rerekētanga rānei o te āhua o te kiri - inā koa ki ngā konganuku ngohengohe, ki ngā whatu kua orohia rānei. Koinei te wāhi e peke whakamua ai te auahatanga a ZHHIMG me te rūri hau mānu ā-Custom Ceramic.
Ehara tēnei i te mea he mata tika uku anake, he kōhao kua keria ki roto. He pūnaha aerostatic tino hangarau, i hangaia mā te whakamahi i ngā mahi wai rorohiko hei tuku i te rere o te hau ōrite, laminar puta noa i te roanga katoa o te rūri. Ina pēhia ki te hau ma, maroke (hauota rānei i ngā taiao tairongo), ka mānu te rūri i te 5–10 microns ki runga ake i te mea mahi—ka whakakore i te pa o te tinana me te pupuri tonu i te tūnga tika. Ko te hua? He ine pono kāore e pa mō te papatahi, te tika, te manatoko teitei o te taahiraa rānei, me te taea te whakahoki ki raro ki te ±0.2 µm.
Kei te whakamahia e tētahi taiwhanga rorohiko matūriki i Switzerland tētahi ruri hau mānu 600-mm te rahi hei tirotiro i ngā kawe maramara superconducting. "Ko tētahi pā - ahakoa he pene ngohengohe - ka puta he ahotea e whakarerekē ana i te mahi qubit," te whakamārama a tā rātou miihini tukanga. "Ka homai e te ruri uku mānu-hau te tohutoro e hiahiatia ana e mātou me te kore e pā ki te wāhanga. Kua tino hira te mahi."
Ko te mea e taea ai tēnei ko te whakaurunga ahurei a ZHHIMG o te pūtaiao rauemi, te miihini tika, me te tohungatanga ine. Ahakoa he maha ngā kaiwhakarato e whakaaro ana ki ngā uku hei wāhanga hanganga, ka arotauhia e mātou hei taonga ine. Kei roto i ā mātou hoahoa Ruri Tapawhā Uku ngā taha kua whakapikohia hei ārai i te pakaru, ngā tuara kua oti te pania hei whakaiti i te kanapa i raro i te rama tirotiro, me ngā tohu pono kōwhiringa mō ngā pūnaha tirohanga aunoa. Mō ngā tono rūma ma, ka orohia ngā mata ki te Ra < 0.02 µm hei whakaiti i te piri o te matūriki.
Nā te mea he rerekē ia tono, kāore mātou e whakapono ki te kotahi te rahi e pai ana mō te katoa. Me hiahia koe ki tētahi Tapa Tika Uku me ngā awa korehau kua whakauruhia hei pupuri i ngā angiangi i te wā tirotiro? Nā mātou i hanga. Me hiahia herūri tapawhāme ngā kōhao-roto e hāngai ana ki te pito o tō pūwero CMM? Kua oti. Kei te hiahia koe i tētahi ruri hau mānu uku ritenga me ngā pūoko pēhanga whakauru me te urupare taumata mamati? Kei te whakamātautau beta kē tēnei me tētahi kiritaki rererangi Tier-1.
Kua whai ake te mōhiotanga o te umanga. I roto i te Arotakenga Matatini Matatau o te Ao o te tau 2025, i whakahuatia a ZHHIMG hei kamupene anake e tuku ana i tētahi whānau katoa o ngā taputapu tohutoro uku kua whakamanahia—tae atu ki ngā momo rere—me te whakamana āhuahanga katoa me te whai i ngā mea matihiko. Engari ko te mea nui ake, kei te tere haere te whakamahinga: neke atu i te 60% o ā mātou ota rūri uku ināianei i ahu mai i ngā umanga i whakaaro i mua he "rahi rawa" aua taputapu—tae noa ki te ine i te rerekētanga.
I huri te kamupene hou e hanga ana i ngā taputapu hauora hei whakauru i ngā whakaurunga io mai i te maitai ki tā mātou Rūri Tapawhā Uku, ā, i kite i te pikinga o tā rātou hua tuatahi mā te 22%. "I waiho e te tapawhā tawhito he kōhao iti ki runga i ngā whare titanium," te kī a tā rātou kaiwhakahaere QA. "Kāore mātou i mōhio tae noa ki tā mātou whakawhiti. Ināianei, ka paahitia e ia wāhanga ngā tirotiro tirohanga me ngā tirotiro ā-ahu i te whakamātautau tuatahi."
Nō reira, i a koe e aromatawai ana i tō whakapai ake ine ine e whai ake nei, pātai atu ki a koe anō: Kei te tāpiri atu taku taha tika o nāianei i te koretake—kei te whakakore atu rānei?
Mena kei te taha o te kitea te mahi a tō tukanga, tera pea kei roto i ngā uku te whakautu—ehara i te mea hou, engari he mea nui. I ZHHIMG, ehara i te mea ko ngā taputapu Uku Tika Uku, Uku Tapawhā Uku, Uku Tika Tapawhā Uku rānei e hangaia ana e mātou. Ka hangaia e mātou te maia ki roto i ia maikorona.
Wā tuku: Hakihea-31-2025