I roto i te mekameka hanga matūriki, he rite te pūnaha whakawhiti wafer ki te "raina ora o te raina whakaputa maramara", ā, ko tōna pumau me te tika te mea e whakatau tika ana i te tere hua o ngā maramara. Ko te whakatupuranga hou o ngā pūnaha whakawhiti wafer he whakakotahi i ngā motuka raina me ngā turanga karāhe, ā, ko ngā painga ahurei o ngā rauemi karāhe te waehere matua hei iriti i te tuku mahi-teitei.
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Turanga karāhe: Te hanga i tētahi "tūranga pakari-toka" mō te tuku pūmau
Kua rau miriona tau te whakapainga o te whenua i roto i te karāneti, ā, he rite tonu te whakatiotanga o roto o ngā kohuke. Nā tēnei āhuatanga taiao, he mea tino pai hei rauemi turanga mō ngā pūnaha whakawhiti wafer. I roto i te taiao uaua o ngā rūma horoi semiconductor, ka taea e te karāneti, me tōna tauwehenga tino iti o te whakawhānui wera (5-7 ×10⁻⁶/℃ anake), te ātete i te wera e puta mai ana i te wā e whakahaerehia ana ngā taputapu me te awe o ngā huringa pāmahana taiao, e whakarite ana i te pumau o te rahi turanga me te karo i te peka o te ara tuku i puta mai i te whakarerekētanga wera. Ka taea e tana mahi whakamātao wiri whakamiharo te mimiti tere i ngā wiri miihini i puta mai i te wā e tīmata ana, e kati ana me te whakateretere i ngā motuka raina, tae atu ki ngā pokanoa o waho i puta mai i te whakahaere o ētahi atu taputapu i roto i te awheawhe, e whakarato ana i tētahi tūāpapa pumau me te "kore wiri" mō te tuku wafer.
I taua wā tonu, mā te pumau matū o te karāhe ka kore e waikura, e waikura rānei i roto i ngā awheawhe haurua-ira, kei reira ngā matū waikawa me ngā matū kawakore e tere haere ana, ā, e hiahiatia ana te horoi nui, kia kore ai e pā ki te tika o te tuku nā te koroheketanga o ngā rauemi, te mimiti rānei o ngā poke. Mā ngā āhuatanga o te mata maeneene me te matotoru ka taea te whakaiti i te piri o te puehu, te whakatutuki i ngā paerewa kore-puehu pakari o ngā rūma ma, me te whakakore i te tūponotanga o te poke o te wafer mai i te pakiaka.
Te pānga "hononga koura" o ngā motuka raina me te karāhe
Ko ngā motuka raina, me ō rātou āhuatanga kāore he āputa whakawhiti miihini, he tere tere me te tere urupare teitei, ka whakawhiwhia ki te tuku wafer me ngā painga o te "tere, tika me te pumau". Ka whakaratohia e te turanga karāhe he tūāpapa tautoko pakari me te pono mōna. Ka mahi tahi ngā mea e rua ki te whakatutuki i te pikinga o te mahi. Ina peia e te motuka raina te kawe wafer ki te rere i runga i te ara turanga karāhe, ka whakarite te pakari me te pumau o te turanga i te tuku pai o te kaha taraiwa motuka, ka karo i te ngaronga kaha, te whakaroa rānei o te tuku i puta mai i te whakarerekētanga o te turanga.
Nā te hiahia mō te tika o te nanoscale, ka taea e ngā motuka raina te whakatutuki i te mana whakahaere nekehanga taumata-iti-micron. Ko ngā āhuatanga tukatuka tino tika o ngā turanga granite (me ngā hapa papatahi e whakahaeretia ana i roto i te ±1μm) he tino ōrite ki te mana whakahaere tika o ngā motuka raina, me te whakarite tahi kia iti iho i te ±5μm te hapa tūnga i te wā e tukuna ana te wafer. Ahakoa he tere tere te neke i waenga i ngā taputapu tukatuka maha, he tūnga tika rānei mō te tuku wafer, mā te whakakotahitanga o ngā motuka raina me ngā turanga granite ka taea te whakarite "kore he rerekētanga me te kore wiri" i roto i te tuku wafer.
Manatoko mahi ahumahi: Whakapai ake takirua i te whai huatanga me te reiti hua
Whai muri i te whakapai ake i tana pūnaha whakawhiti wafer, i tangohia e tetahi umanga haurua-ā-ao matua he otinga motuka raina + turanga karāhe, i whakapiki ake i te pai o te whakawhiti wafer mā te 40%, i whakaiti i te tere o te puta o ngā hapa pēnei i te tukinga me te taurite i te wā o te tukanga whakawhiti mā te 85%, ā, i whakapai ake i te tere hua whānui o ngā maramara mā te 6%. Kei muri i ngā raraunga ko te taurangi o te pumau o te tuku e whakaratohia ana e te turanga karāhe me te pānga tere-teitei me te tika o te motuka raina, e whakaiti nui ana i te ngaronga me te hapa i roto i te tukanga tuku wafer.
Mai i ngā āhuatanga rauemi ki te hanga tika, mai i ngā painga mahi ki te manatoko mahi, kua tautuhia anō e te whakakotahitanga o ngā motuka raina me ngā turanga karāhe ngā paerewa o ngā pūnaha whakawhiti wafer. I te heke mai, ina ahu whakamua te hangarau haurua-ira ki ngā tukanga 3nm me te 2nm, ka tino kaha tonu te werohanga o ngā rauemi karāhe ki te whanaketanga o te umanga me ō rātou painga kore e taea te whakakapi.
Wā tuku: Mei-14-2025