Kei te whai tonu te umanga haurua-ā-ira o te ao i te "Wā Angstrom," te wāhi e inehia ai ngā rahinga transistor i roto i te whānui o ētahi ngota iti noa iho. I te nekehanga o ngā taputapu tuhi me ngā taputapu tirotiro ki ēnei tauine moroiti, kua neke te hiahia mō te pumau hanganga mai i te "macro" ki te "nano." Kei te ngākau o tēnei hurihanga he rauemi tawhito pērā i te Ao tonu: ko te Precision Granite.
Ahakoa he tokomaha e whakaaro ana he kōhatu noa iho te karāhe, i roto i te horopaki o tētahite wāhanga nanopositioninghe pūnaha tirotiro anga tere-teitei rānei, he uku hangarau matatau. He mea nui te mārama ki te rerekētanga i waenga i ngā taputapu ine taketake me ngā papa nekehanga matatau mō ngā OEM e hiahia ana ki te pana i ngā rohe o ngā mea ka taea i roto i te hanga silicon.
CMM Granite vs. Pereti Mata Granite: Te Mārama ki te Huringa Hangarau
I roto i te maha o ngā taiwhanga whakahaere kounga, ko tePereti Mata Granitehe mea e kitea whānuitia ana—he tohutoro pono, papatahi hoki mō te ine ā-ringa. Heoi anō, he whakaaro hē noa iho ko te pereti mata me te turanga Granite CMM (Coordinate Measuring Machine) ka taea te whakawhiti. Mai i te tirohanga hangarau, e tohu ana rāua i ngā taumata uaua e rua.
He mea hanga te pereti mata mō te pumau tonu. Ko tana mahi matua he noho papatahi i raro i te kawenga pumau. He rerekē, me taea e te turanga karāhe mō te CMM, mō te wāhanga tika rānei te whakahaere i ngā kawenga hihiri. I te nekehanga o te piriti o te CMM, i te whakaterenga rānei o te motuka raina i te wāhanga wafer i ētahi G, me ātete te karāhe ehara i te piko anake, engari me ātete hoki ki te takahuri me te harurutanga.
Ka whiriwhiria motuhaketia e ngā miihini ZHHIMG te "Black Granite" mō ngā tono hihiri nā te mea he nui ake te kiato me te hanganga angiangi o te kōhao. Ahakoa he momo porowhita ake pea te whakamahi i tētahi pereti mata paerewa, me whakamahi te turanga CMM i te Young's Modulus teitei rawa atu kia kore ai te "pakū" o te nekehanga tere-nui e huri hei mowhiti hanganga ka kino ai ngā raraunga ine.
Ngā Wāhanga Tika i roto i te Hanganga Ārahi-Haumaru: Te Pūtake o te Hua
I roto i te hangahanga haurua-ā-ira, ko te putanga me te hua ngā inenga tino nui e rua. E whakawhirinaki tika ana ēnei ki te mahi angā wāhanga tino tikaAhakoa ko te wāhanga angiangi i roto i te mīhini whakairo DUV/EUV, ko te pūnaha tūnga rānei i roto i te taputapu Tirotiro Whatu Aunoa (AOI), me āwhina e te rauemi turanga te whakahokinga o te iti-nanometer.
Ko te wero matua o te hanga ko te wera. He nui te pūngao wera e whakaputaina ana e ngā motuka raina me ngā kaiwhakaoho. Mena he konumohe, he maitai rānei te turanga o te atamira, ka neke te angaanga i te āhua tika nā te whānui o te wera, ka puta he "hapa paparua" ka pakaru ai ngā puranga maramara katoa.
Mā te iti rawa o te tauwehenga whakawhanui wera (CTE) o te karāhe ka whakarite kia mau tonu te "mahere" ā-tinana o te atamira ahakoa te wera o ngā motuka. Hei tāpiri, ka whakaratohia e ZHHIMG ngā wāhanga karāhe kua whakaritea me ngā ara kawe hau kua whakauruhia. Nā te mea ka taea te whakapiri i te karāhe ki te papatahi rite ki te whakaata, ka mahi hei mata-whakamuri tino pai mō ngā kawe hau, ka taea ai e ngā atamira te "mānu" i runga i te kiriata angiangi o te hau me te kore waku me te kore e piri.
Te Ahupūngao o te Pūtake Wāhanga Nanopositioning
Ina tomo tātou ki te ao o tete wāhanga nanopositioning, kei te aro atu tātou ki ngā nekehanga he iti iho i te makawe tangata, he 10,000 te nui. I tēnei taumata, ko te wiri te hoariri. Ka wiri tonu ngā papa ahumahi paerewa nā ngā pūnaha HVAC, te haereere o te waewae, me ngā mīhini tata.
He tātari nui te karāhe hei tātari iti-haere. Nā te nui o tōna taumaha me te nui o te whakamātao o roto, ka mimiti noa i ngā wiri auau-teitei i mua i te taenga atu ki ngā pūoko tairongo, ki te wafer rānei. Ko tēnei "wehewehenga kore mahi" te take e whakawhirinaki ai ngā kaiwhakarato lithography matua o te ao ki a ZHHIMG hei whakarato i ngā turanga taumaha, pumau mō ā rātou wāhanga hototahi ki te korehau. Kua rongoatia motuhaketia tā mātou karāhe kia kore ai e puta he hau, kia pai ai mō ngā taiao korehau-teitei e hiahiatia ana mō ngā tukanga hihi-irahiko me te EUV.
Te Whakaeke ki te Rohe: Te Painga ZHHIMG
He haerenga manawanui nui te whakawhiti mai i te poraka kōhatu mata ki te wāhanga kōhatu-haurua. Ahakoa e tata ana te huri CNC ki a tātou, ka tutuki te taumata "Super-Precision" whakamutunga mā te whakamahi ā-ringa. He tukanga tēnei e whakamahia ai e ngā tohunga hangarau ZHHIMG ngā whakapiri kirikiri me ngā nekehanga ā-ringa hei heu i ngā wāhanga o te micron i ia wā.
Mō tētahite wāhanga nanopositioning, ehara i te mea ko te papatahi anake te whakaritenga; he mea nui anō hoki te whakarara me te poutū o ngā mata aratohu. Ka whakamahia e tā mātou whare ngā taputapu aroturuki taiaho me ngā taumata hiko me ngā whakataunga o te 0.1 hēkona-āwhata hei manatoko kei te tino tika te tūnga o ia tuaka. Mā tēnei taumata mahi toi ka whakarite kia tata te turanga miihini ki te "tino pai" e taea ana e te ahupūngao ina whakairihia e te kiritaki ā rātou motuka raina me ngā kaiwhakawaehere.
Te Whakatūpato i te Ao Tūroa
I te neke haere o te umanga ki ngā pona 2nm me tua atu, ka kaha ake ngā whakaritenga mō te parakore o ngā rauemi me te pumau o ngā āhuatanga. Ko te whakaurunga o te karāhe me ētahi atu rauemi matatau—pērā i ngā piriti muka waro, i ngā pūwero uku rānei—koinei te rohe e whai ake nei i roto i te whakahaere nekehanga.
Kei te whakapau kaha tonu a ZHHIMG ki te neke atu i te noho hei kaiwhakarato noa iho; he hoa mahi tahi mātou i roto i te mekameka tuku haurua-ā-ao. Mā te whakarato i ngā turanga tino pumau e hiahiatia ana mō te whakatupuranga o ngā wāhanga tino tika e whai ake nei, kei te āwhina mātou ki te hanga i ngā mīhini hei hanga i te heke mai.
Te wā tuku: Hui-tanguru-02-2026