Kua whānuitia te whakamahinga o ngā wāhanga karāneti i roto i te tukanga hanga haurua-ira nā ō rātou āhuatanga pai rawa atu pērā i te whakaotinga mata pai rawa atu, te pakari teitei, me te aukati wiri pai rawa atu. He mea nui ngā wāhanga karāneti mō ngā taputapu hanga haurua-ira, tae atu ki ngā mīhini whakairo, ngā mīhini whakakanapa, me ngā pūnaha ine ine, nā te mea ka whakaratohia he tūnga tika me te pumau i te wā o te tukanga hanga. Ahakoa ngā painga katoa o te whakamahi i ngā wāhanga karāneti, he hapa anō hoki ō rātou. I roto i tēnei tuhinga, ka matapakihia e mātou ngā hapa o ngā wāhanga karāneti mō ngā hua tukanga hanga haurua-ira.
Tuatahi, he nui te tauwehenga whānui o ngā wāhanga karāhe. Ko te tikanga ka whānui haere rātou i raro i te ahotea wera, ka raru pea i te wā o te tukanga hanga. Me tino tika te tukanga hanga i te haurua-ā-ira me te tika o ngā āhuatanga ka raru pea nā te ahotea wera. Hei tauira, ko te whakarerekētanga o te anga silicon nā te whānui wera ka raru pea i te wā o te tuhi, ka raru pea te kounga o te taputapu haurua-ā-ira.
Tuarua, he hapa pūngao kei ngā wāhanga karāneti ka puta ai he turuturu korehau i roto i te tukanga hangahanga haurua-ira. Mā te noho mai o te hau, o tētahi atu hau rānei i roto i te pūnaha ka puta he poke i te mata o te wafer, ka puta ai he hapa ka pā ki te mahi a te taputapu haurua-ira. Ka taea e ngā hau korehau pēnei i te argon me te helium te mimiti ki roto i ngā wāhanga karāneti pūngao ka hanga he mirumiru hau ka taea te whakararuraru i te pumau o te tukanga korehau.
Tuatoru, he pakarukaru iti kei roto i ngā wāhanga o te karāhe ka taea te whakararuraru i te tika o te tukanga hanga. He rauemi pakarukaru te karāhe ka taea te whakawhanake i ngā pakarukaru iti i roto i te wā, inā koa ka pāngia e ngā huringa ahotea tonu. Ko te noho mai o ngā pakarukaru iti ka arahi pea ki te koretake o te āhua, ka puta ai ngā raruraru nui i roto i te tukanga hanga, pērā i te whakatikatika i te lithography, te oro rānei i te wafer.
Tuawhā, he iti noa te ngāwari o ngā wāhanga karāhe. Me whai taputapu ngāwari te tukanga hanga haurua-ira hei whakauru i ngā huringa tukanga rerekē. Heoi, he pakari ngā wāhanga karāhe, ā, kāore e taea te urutau ki ngā huringa tukanga rerekē. Nō reira, ko ngā huringa katoa i roto i te tukanga hanga me tango, me whakakapi rānei i ngā wāhanga karāhe, ka mutu te mahi, ka pāngia hoki te hua.
Tuarima, me whakahaere motuhake ngā wāhanga o te karāhe nā te taumaha me te pakarukaru. He rauemi matotoru, taumaha hoki te karāhe e hiahia ana ki ngā taputapu whakahaere motuhake pērā i ngā kerēne me ngā taputapu hiki. Hei tāpiri, me āta tākai me te kawe ngā wāhanga o te karāhe kia kore ai e pakaru i te wā e tukuna ana, ka nui ake te utu me te wā.
Hei whakamutunga, he ngoikoretanga kei ngā wāhanga karāhe ka pā ki te kounga me te hua o ngā hua tukanga hanga haurua-ira. Ka taea te whakaiti i ēnei hapa mā te whakahaere me te tiaki tupato i ngā wāhanga karāhe, tae atu ki te tirotiro ā-wā mō ngā pakaru iti me ngā hapa porosity, te horoi tika hei ārai i te poke, me te whakahaere tupato i te wā e kawe ana. Ahakoa ngā hapa, he wāhanga nui tonu ngā wāhanga karāhe o te tukanga hanga haurua-ira nā te mea he pai ake te mata o te mata, he pakari teitei, me te pai o te aukati i te wiri.
Wā tuku: Hakihea-05-2023