;
I roto i te ao hanga haurua-ira, ko te tika o ngā taputapu tirotiro wafer te mea e whakatau tika ana i te kounga me te hua o ngā maramara. Hei turanga tautoko i ngā wāhanga matua o te kimi, he mea nui te pumau o te rauemi turanga taputapu ki te mahi roa o ngā taputapu. Ko te karāneti me te rino maka he rauemi turanga e rua e whakamahia whānuitia ana mō ngā taputapu tirotiro wafer. Kua whakaatuhia e tētahi rangahau whakatairite tekau tau te roa ngā rerekētanga nui i waenganui i a rāua e pā ana ki te pumau o te rahi, e whakarato ana i ngā tohutoro nui mō te whiriwhiri taputapu.
Papamuri me te Hoahoa Whakamātautau
He tino teitei ngā whakaritenga mō te tika o te kitenga i roto i te tukanga whakaputa o ngā anga haurua-ira. Ahakoa te rerekētanga o te rahinga taumata-micrometer ka taea te heke o te mahi maramara, te pakaru rānei. Hei tūhura i te pumau o te rahinga o te karāhe me te rino maka i te wā roa e whakamahia ana, i hangaia e te rōpū rangahau ngā whakamātautau i whakatauira i ngā taiao mahi tūturu. I tīpakohia ngā tauira karāhe me te rino maka o te whakatakotoranga kotahi, ā, i whakanohoia ki roto i tētahi rūma taiao i reira ka rerekē te pāmahana mai i te 15℃ ki te 35℃, ā, ka rerekē te haumākū mai i te 30% ki te 70% RH. I whakatauirahia te wiri ā-pūkaha i te wā e whakahaerehia ana te taputapu mā te ripanga wiri. I inehia ngā rahinga matua o ngā tauira i ia hauwhā mā te whakamahi i tētahi inenga taiaho tino tika, ā, i tuhia tonutia ngā raraunga mō ngā tau 10.

Hua whakamātautau: Te painga tino pai o te karāhe
Tekau tau o ngā raraunga whakamātautau e whakaatu ana he tino pumau te papa o te karāhe. He tino iti te tauwehenga o te whakawhānui wera, ko te toharite he 4.6 × 10⁻⁶/℃ anake. I raro i ngā huringa pāmahana nui, ka whakahaerehia tonutia te rerekētanga o te āhua i roto i te ± 0.001mm. I te aroaro o ngā huringa haumākū, nā te hanganga matotoru o te karāhe ka tata kore e pāngia, ā, kāore he huringa āhua e taea te ine. I roto i te taiao wiri miihini, ka mimiti pai ngā āhuatanga whakamātao pai o te karāhe i te kaha wiri, ā, he tino iti te piki me te heke o te āhua.
He rerekē, mō te papa rino maka, ko tōna tau toharite o te whakawhānui wera ka eke ki te 11×10⁻⁶/℃ - 13×10⁻⁶/℃, ā, ko te rerekētanga āhua mōrahi i puta mai i ngā huringa pāmahana i roto i ngā tau 10 ko ±0.05mm. I roto i te taiao makuku, ka ngāwari te rino maka ki te waikura me te pirau. Ko ētahi tauira e whakaatu ana i te whakarerekētanga ā-rohe, ā, ka piki ake te rerekētanga āhua. I raro i te mahi a te wiri ā-pūkaha, he ngoikore te mahi whakaiti wiri o te rino maka, ā, ka rerekē haere tonu tōna rahi, ka uaua ki te whakatutuki i ngā whakaritenga tino tika o te tirotiro wafer.
Ko te take matua mō te rerekētanga o te pumau
I hangaia te karāneti i roto i ngā rau miriona tau mā roto i ngā tukanga whenua. He matotoru, he ōrite hoki tōna hanganga o roto, ā, he pumau te whakatakotoranga o ngā tioata kohuke, e whakakore ana i te ahotea o roto i te taiao. Nā tēnei ka tino kore e pāngia e ngā huringa o ngā āhuatanga o waho pērā i te pāmahana, te haumākū me te wiri. Ka hangaia te rino maka mā te tukanga maka, ā, he hapa moroiti pērā i ngā pūwero me ngā kōhao onepu i roto. I taua wā, ko te ahotea toenga i puta i te tukanga maka ka ngāwari ki te whakaputa i ngā huringa āhua i raro i te whakaohooho o te taiao o waho. Nā ngā āhuatanga konganuku o te rino maka ka ngāwari ki te waikura nā te haumākū, ka tere ake te kino o te hanganga me te whakaiti i te pumau o te āhua.
Te pānga ki ngā taputapu tirotiro wafer
Mā ngā taputapu tirotiro angiangi i hangaia ki te papa karāhe, me tōna mahi āhua pumau, ka taea te whakarite kia mau tonu te tika o te pūnaha tirotiro mō te wā roa, ka whakaiti i te whakatau hē me te ngaro o te kitenga i puta mai i te paheketanga o te tika o ngā taputapu, ā, ka tino whakapai ake i te hua o te hua. I taua wā, ko te iti o ngā whakaritenga tiaki ka whakaiti i te utu katoa o te huringa ora o ngā taputapu. Ko ngā taputapu e whakamahi ana i ngā papa rino maka, nā te ngoikore o te pumau o ngā āhua, me whakatikatika me te tiaki auau. Ehara i te mea ka piki ake ngā utu whakahaere anake, engari ka pā pea ki te kounga o te hanga semiconductor nā te koretake o te tika, ka puta he mate ōhanga pea.
I raro i te ia o te umanga haurua-ira e whai ana kia teitei ake te tika me te kounga pai ake, ko te whiriwhiri i te karāhe hei rauemi turanga mō ngā taputapu tirotiro wafer he mahi whakaaro nui hei whakarite i te mahi a ngā taputapu me te whakarei ake i te whakataetae a ngā umanga.
Wā tuku: Mei-14-2025
