I roto i ngā mara o te hanga tino tika me te rangahau pūtaiao, ko te papatahi o ngā papa tino tika o te karāhe he tohu matua hei whakarite i te tika o ngā taputapu. Anei tētahi whakataki taipitopito ki ētahi tikanga kimi matua me ā rātou tikanga whakahaere māu.
I. Tikanga Kimi i te Interferometer Laser
Ko te ine whakawhiti taiaho te taputapu pai mō te kimi i te papatahi tino tika. Hei tauira, ko te ine whakawhiti taiaho ZYGO GPI XP, ka taea e tōna taumira te tae ki te 0.1nm. I te wā e mahi ana i te kimi, tuatahihia te pūtake mārama o te ine whakawhiti ki te tūāpapa ka wehea te mata o te tūāpapa ki ngā wāhi whatunga 50mm×50mm. Muri iho, ka kohia ngā raraunga taha whakararuraru i ia tohu, ā, ka whakauruhia, ka tātarihia ngā raraunga mā te whakamahi i te pūrau Zernike hei whiwhi i te hapa papatahi. Ka whakamahia tēnei tikanga ki ngā tūāpapa tino tika, ā, ka taea te kimi i ngā hapa papatahi o te ≤0.5μm/m². He mea whakamahi noa i roto i te kimi i ngā mīhini whakaahua whakaahua me ngā tūāpapa mīhini ine taunga-toru teitei.
II. Tikanga Whakatakotoranga Taumata Hiko
He māmā noa te whakamahi i te kimi taumata hiko, ā, he tino whai hua. I tīpakohia te taumata hiko TESA A2 (me te taumira o te 0.01μm/m) ā, i whakaritea ki roto i te rarangi 9×9 i te taha o te tuaka X/Y o te tūāpapa. Mā te kohikohi i ngā raraunga piko o ia taumata, kātahi ka whakamahi i te tikanga tapawhā iti rawa mō te tatau, ka taea te whiwhi tika i te uara papatahi. Ka taea e tēnei tikanga te tautuhi pai i ngā āhuatanga kōpiko me te kōpiko o te tūāpapa. Hei tauira, ka taea hoki te kite i te piki me te heke o te 0.2μm i roto i te whānuitanga 50mm, he mea e tika ana mō te kite tere i roto i te whakaputanga papatipu.
Iii. Tikanga karaihe papatahi whatu
He pai te tikanga karaihe whatu papatahi mō te kimi i ngā tūāpapa iti. Tāpirihia te karaihe whatu papatahi ki te mata hei whakamātautau i runga i te tūāpapa, ā, mātakitaki i ngā tawhā pokanoa i waenganui i a rātou i raro i te whakamārama a te pūtake mārama kotahi-tae (pērā i te rama konutai). Mēnā he rārangi tika whakarara ngā rārangi, he tohu tēnei he papatahi pai. Mēnā ka puta he rārangi piko, tatauhia te hapa papatahi i runga i te nui o te piko o te rārangi. Ko ia rārangi piko e tohu ana i te rerekētanga teitei o te 0.316μm, ā, ka taea te whiwhi raraunga papatahi mā te hurihanga ngāwari.
Whā. Tikanga tirotiro mīhini ine taunga-toru
Ka taea e te mīhini ine taunga-toru te whakatutuki i te ine tino tika i roto i te wāhi-toru-ahu. Whakatakotoria te papa granite ki runga i te tēpu mahi o te mīhini ine, ā, whakamahia te ine hei kohikohi raraunga ōrite mai i ngā pūwāhi ine maha i runga i te mata o te papa. Ka tukatukahia, ka tātarihia hoki ēnei raraunga e te pūnaha mīhini ine hei whakaputa i tētahi pūrongo papatahi o te papa. E kore e taea e tēnei tikanga te kite i te papatahi anake, engari ka whiwhi hoki i ētahi atu tawhā āhuahanga o te papa i te wā kotahi, ā, he pai mō te kite whānui i ngā papa granite nui.
Mā te matatau ki ēnei tikanga kimi ka āwhina i a koe ki te aromatawai tika i te papatahi o te tūāpapa tika o te karāhe, ā, ka whakarato hoki i tētahi taurangi pono mō te mahi pumau o ngā taputapu tika.
Wā tuku: Mei-29-2025