I roto i te mara o te tirotiro i te papa haurua-ira, he hononga tika te parakore o te taiao rūma ma ki te hua o te hua. I te mea kei te whakapai tonu te tika o ngā tukanga hanga maramara, kei te kaha haere ngā whakaritenga mō ngā papa kawe o ngā taputapu kimi. Ko ngā papa karāhe, me ōna āhuatanga o te kore tukunga katote konganuku me te iti o te parahanga matūriki, kua hipa ake i ngā rauemi kowiri tira tuku iho, ā, kua noho hei otinga pai mō ngā taputapu tirotiro papa.
He toka mura tūturu te karāneti, he mea hanga mai i ngā kohuke kore-whakarewa pērā i te kuata, te feldspar me te mika. Nā tēnei āhuatanga ka hua ake te painga o te kore tukunga katote whakarewa. He rerekē, ko te maitai kore waikura, hei koranu o ngā konganuku pērā i te rino, te chromium me te nikara, he ngāwari ki te waikura hikohiko i runga i tōna mata nā te mimiti o te mamaoa wai me ngā hau waikawa, kawakore rānei i roto i te taiao rūma ma, ka hua ake te maturuturunga o ngā katote whakarewa pērā i te Fe²⁺ me te Cr³⁺. Kia piri ēnei katote iti ki te mata o te papa, ka huri i ngā āhuatanga hiko o te rauemi semiconductor i roto i ngā tukanga e whai ake nei pērā i te whakaahua me te whakairo, ka puta te nekehanga ngaohiko paepae o te transistor, ā, ka arahi atu ki ngā ara iahiko poto i roto i te ara iahiko. E whakaatu ana ngā raraunga whakamātautau umanga ngaio i muri i te whakaaturanga tonu o te papa karāneti ki te taiao pāmahana me te haumākū rūma ma (23±0.5℃, 45%±5% RH) mō ngā haora 1000, ko te tukunga o ngā katote whakarewa he iti iho i te rohe kitenga (< 0.1ppb). Ko te tere o te hapa o ngā angaanga i puta mai i te poke o te katote whakarewa i te whakamahinga o ngā papa maitai kore waikura ka eke ki te 15% ki te 20%.
Mō te whakahaere i te poke o ngā matūriki, he tino pai te mahi a ngā papa granite. He tino teitei ngā whakaritenga a ngā rūma ma mō te kukū o ngā matūriki iri i te rangi. Hei tauira, i roto i ngā rūma ma ISO Class 1, kāore e neke ake i te 10 te maha o ngā matūriki 0.1μm e whakaaetia ana mō ia mita pūtoru. Ahakoa kua oti te whakakanapa i te papa maitai kore waikura, tera pea ka puta he paru whakarewa, he unahi waikura rānei e tihore ana nā ngā kaha o waho pēnei i te wiri taputapu me te mahi a ngā kaimahi, ka taea te whakararuraru i te ara whatu kitenga, te rakuraku rānei i te mata o te wafer. Ko ngā papa granite, me tō rātou hanganga kohuke matotoru (kiato ≥2.7g/cm³) me te pakeke teitei (6-7 i runga i te tauine Mohs), kāore e ngāwari ki te kakahu, ki te pakaru rānei i te wā e whakamahia ana mō te wā roa. E whakaatu ana ngā inenga ine ka taea e rātou te whakaiti i te kukū o ngā matūriki iri i te rangi o te rohe taputapu kitenga mā te neke atu i te 40% ki te whakataurite ki ngā papa maitai kore waikura, e pupuri ana i ngā paerewa taumata rūma ma.
Haunga ōna āhuatanga ma, he nui atu te mahi whānui o ngā papa granite i tō te maitai kore waikura. Mō te pumau o te wera, ko tōna tauwehenga whānui wera he (4-8) ×10⁻⁶/℃ anake, he iti iho i te haurua o te maitai kore waikura (tata ki te 17×10⁻⁶/℃), ka taea te pupuri i te tika o te tūnga o ngā taputapu kimi ina rerekē te pāmahana i roto i te rūma ma. Ko te āhuatanga whakamākū teitei (ōwehenga whakamākū > 0.05) ka taea te whakaiti tere i te wiri o ngā taputapu me te ārai i te wiri o te taputapu kimi. Mā tōna ātete waikura taiao ka taea te noho pumau ahakoa ka pāngia e ngā whakarewa photoresist, ngā hau whakairo me ētahi atu matū me te kore e hiahiatia he tiaki paninga tāpiri.
I tēnei wā, e whakamahia whānuitia ana ngā papa granite i roto i ngā whare hanga wafer matatau. E whakaatu ana ngā raraunga, whai muri i te whakamahi i te papa granite, kua heke te tere whakatau hē o te kitenga matūriki mata wafer mā te 60%, kua whakaroahia te huringa whakatikatika taputapu mā te toru ngā wā, ā, kua heke te utu whakaputa whānui mā te 25%. I te neke haere o te umanga semiconductor ki te tika ake, ka haere tonu ngā papa granite, me ōna painga matua pērā i te kore tukunga katote konganuku me te iti o te parahanga matūriki, ki te whakarato tautoko pumau me te pono mō te tirotiro wafer, ka noho hei kaha nui ki te akiaki i te ahunga whakamua o te umanga.
Wā tuku: Mei-20-2025