He rauemi e whakamahia whānuitia ana te karāneti i roto i te umanga haurua-waenga mō ōna āhuatanga miihini pai rawa atu, tōna pumau wera, me tōna tauwehenga iti o te whakawhānui wera. Heoi, i te piki haere tonu o te tono mō te tika me te hua teitei ake, kua puta ake ngā rauemi rerekē hei kōwhiringa whai hua mō te hanga i ngā wāhanga taputapu haurua-waenga. I roto i tēnei tuhinga, ka tūhuratia e mātou ētahi o ngā rauemi rerekē mō ngā wāhanga karāneti i roto i ngā taputapu haurua-waenga, me te whakataurite i ō rātou painga me ō rātou ngoikoretanga.
Ngā Rauemi Rerekē mō ngā Wāhanga Granite
1. Ngā rauemi karāhe-uku
Kua whānuitia te whakamahinga o ngā rauemi karāhe-uku, pērā i a Zerodur me Cervit, i roto i te umanga haurua-waea nā te iti o te tauwehenga whakawhanui wera, e tata ana ki te silicon. Nō reira, ka taea e ēnei rauemi te whakarato i te pumau wera pai ake me te tika ake i roto i te tukanga hanga haurua-waea. He tino ōrite me te pumau a Zerodur, e pai ai mō te hanga taputapu lithography.
Ngā Painga:
- Te iti o te tauwehenga o te whakawhānui wera
- Te tino tika me te pumau
- He pai mō ngā mahi pāmahana teitei
Ngā ngoikoretanga:
- He nui ake te utu ki te whakataurite ki te karāhe
- He pakarukaru, ka uaua pea te mahi miihini me te whakahaere
2. Ngā mea uku
He tino pai ngā āhuatanga miihini o ngā rauemi uku, pērā i te konumohe waikura (Al2O3), te silicon carbide (SiC), me te silicon nitride (Si3N4), he ātete pāmahana teitei, he iti hoki te tauwehenga whānui wera. Nā ēnei āhuatanga ka pai ngā uku mō ngā wāhanga taputapu haurua-ira e hiahia ana ki te pumau wera me te tika teitei, pērā i ngā wāhanga wafer me ngā chucks.
Ngā Painga:
- Te pumau me te kaha o te wera
- Tauwehenga whakawhanui wera iti
- Te ātete nui ki te kakahu me te kore e taea te whakamahi i ngā matū
Ngā ngoikoretanga:
- Ka pakarukaru, ka ngawari hoki te ngatata, inā koa i te wā e miihini ana, e whakahaeretia ana hoki
- He uaua, he roa hoki te wā e pau ana ki te mahi miihini me te whakakanapa i ngā uku
3. Ngā konganuku
Kua whakamahia ngā rauemi whakarewa, pērā i te maitai kore waikura me te titanium, mō ētahi wāhanga taputapu haurua-haurua nā te mea he tino pai te mahi miihini me te kaha teitei. He mea whakamahi noa ēnei i ngā tono kāore e hiahiatia he pumau wera teitei, pērā i ngā wāhanga rūma, ngā hononga, me ngā whāngai.
Ngā Painga:
- He pai te ngāwari ki te miihini me te whakarewa
- Te kaha me te ngāwari o te mahi
- He iti te utu ki te whakataurite ki ētahi atu rauemi
Ngā ngoikoretanga:
- Te tauwehenga whakawhanui wera teitei
- Kāore i te pai mō ngā whakamahinga pāmahana teitei nā te mea he raruraru whakawhanui wera
- Ngāwari ki te waikura me te poke
Whakatau:
Hei whakarāpopototanga, ahakoa he rongonui te karāhe hei whiringa mō ngā wāhanga taputapu haurua-ira, kua puta mai ētahi atu rauemi, he painga me ngā ngoikoretanga motuhake o ia rauemi. He tino tika, he pumau hoki ngā rauemi karāhe-uku, engari ka pakarukaru. He kaha ngā uku, ā, he tino pai te pumau o te wera, engari ka pakarukaru anō hoki, ka uaua ake te hanga. He iti te utu o ngā konganuku, he ngāwari ki te miihini, ā, he ngāwari ki te whakamahi, engari he nui ake te tauwehenga o te whakawhānui wera, ā, he ngāwari ki te waikura me te poke. I te wā e whiriwhiri ana i ngā rauemi mō ngā taputapu haurua-ira, he mea nui kia whakaarohia ngā whakaritenga motuhake o te tono me te whiriwhiri i ngā rauemi e taurite ana i te utu, te mahi, me te pono.
Wā tuku: Maehe-19-2024